设备名称 Equipment name

管式低压氧化退火设备  Horizontal Low Pressure Oxidation/Annealing Equipment

设备型号 Equipment Model

DOA-420/DOA-420L/DOA-420MAX

设备用途 Equipment Application

低压氧化、退火。
Low Pressure oxidation, annealing.

技术特点  Features 

1、大产能。

High throughput.

2、配套相关专利技术，可兼容或升级硼扩散工艺。
Patented technology, compatible or upgradeable with boron diffusion process.

3、独特双嵌套炉门结构。
Unique double-layer-nested furnace door structure.

4、高速平稳整体模组推舟机构。
High-speed and stable integral module boat pushing mechanism.

设备参数  Parameters